Free Downloads Atomic Layer Deposition For Semiconductors
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Hardcover: 263 pages
Publisher: Springer; 2014 edition (October 19, 2013)
Language: English
ISBN-10: 1461480531
ISBN-13: 978-1461480532
Product Dimensions: 6.4 x 0.8 x 9.4 inches
Shipping Weight: 1.1 pounds (View shipping rates and policies)
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Best Sellers Rank: #1,952,552 in Books (See Top 100 in Books) #32 in Books > Computers & Technology > Programming > Algorithms > Memory Management #69 in Books > Science & Math > Chemistry > Physical & Theoretical > Electrochemistry #344 in Books > Engineering & Transportation > Engineering > Electrical & Electronics > Electronics > Semiconductors
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