Free Downloads
Atomic Layer Deposition For Semiconductors

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

Hardcover: 263 pages

Publisher: Springer; 2014 edition (October 19, 2013)

Language: English

ISBN-10: 1461480531

ISBN-13: 978-1461480532

Product Dimensions: 6.4 x 0.8 x 9.4 inches

Shipping Weight: 1.1 pounds (View shipping rates and policies)

Average Customer Review: Be the first to review this item

Best Sellers Rank: #1,952,552 in Books (See Top 100 in Books) #32 in Books > Computers & Technology > Programming > Algorithms > Memory Management #69 in Books > Science & Math > Chemistry > Physical & Theoretical > Electrochemistry #344 in Books > Engineering & Transportation > Engineering > Electrical & Electronics > Electronics > Semiconductors

Atomic Layer Deposition for Semiconductors Nolo's Deposition Handbook: The Essential Guide for Anyone Facing or Conducting a Deposition Deposition Dissection: A Handbook for Doctors Facing Deposition Principles of Growth and Processing of Semiconductors Semiconductors: Data Handbook Semiconductors for Solar Cells (Artech House Optoelectronics Library) The Physics of Low-dimensional Semiconductors: An Introduction Contamination-Free Manufacturing for Semiconductors and Other Precision Products The Essential Guide to Semiconductors Epitaxy of Semiconductors: Introduction to Physical Principles (Graduate Texts in Physics) Optical Processes in Semiconductors (Prentice-Hall electrical engineering series. Solid state physical electronics series) Semiconductors and Semimetals, Vol. 19: Deep Levels, GaAs, Alloys, Photochemistry Advanced Physics of Electron Transport in Semiconductors and Nanostructures (Graduate Texts in Physics) Hot Carriers in Semiconductors Chemical Physics of Nanostructured Semiconductors More Layer Cake, Jelly Roll and Charm Quilts WCF Multi-Layer Services Development with Entity Framework, 4th Edition WCF Multi-layer Services Development with Entity Framework - Fourth Edition The Layer of Lies (Sarah Woods Mystery 20) Comprehensive Treatise of Electrochemistry, Vol. 1: The Double Layer