Free Downloads The Science And Engineering Of Microelectronic Fabrication (The Oxford Series In Electrical And Computer Engineering)

                
              
Free Downloads 
The Science And Engineering Of Microelectronic Fabrication (The Oxford Series In Electrical And Computer Engineering)
The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be used as a textbook for both first year graduate and upper level undergraduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, nonoptical lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The book also makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest.
Series: The Oxford Series in Electrical and Computer Engineering
Hardcover: 560 pages
Publisher: Oxford University Press (February 29, 1996)
Language: English
ISBN-10: 0195105087
ISBN-13: 978-0195105087
Product Dimensions:  7.6 x 1.2 x 9.5 inches
Shipping Weight: 2.4 pounds
Average Customer Review:  5.0 out of 5 stars  See all reviews (3 customer reviews)
Best Sellers Rank: #625,968 in Books (See Top 100 in Books)   #98 in Books > Engineering & Transportation > Engineering > Electrical & Electronics > Electronics > Semiconductors   #133 in Books > Textbooks > Engineering > Electrical & Electronic Engineering   #178 in Books > Engineering & Transportation > Engineering > Electrical & Electronics > Electronics > Microelectronics
This excellent book by Stephen Campbell offers a comprehensive, in-depth look at many areas of microelectronics. It is also written in an easy to read style with a large number of relevant references. I recommend this book to anyone interested in the many areas of microelectronics.
This is the text book for Mr. Campbell's microfabrication class (advanced undergraduate or graduate level) at the University of Minnesota, that's how I got to know this book. It covers all the different areas of modern microfabrication and puts them in the right context to one another. Any previous knowledge of these topics is not required.
I have been using this book since 1997. It is a great book, especially for those with very little knowledge in microelectronics. Reader with non-technical background can easily understand the materials. Lots of picture & diagrams to further enhance understanding. It has helped me with my postgraduate studies, a must for those who wants to know about microelectronics and a good referrence for all.
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